Meta Pellicle Wavefront pre Correction for High NA EUV Lithography: Metasurface pellicles, phase/polarization distortion, mask 3D shadowing ... Python (Computational Mathematics Library)

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Pages: 348, Hardcover, Independently published

Product specifications

Brand Independently Published
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  • 9798279051366

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High NA EUV Imaging and Mask 3D Effects: 0.55 anamorphic optics, reflective...

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High NA EUV Imaging and Mask 3D Effects: 0.55 anamorphic optics, reflective...

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The Mathematics of EUV Lithography: PDEs, Stochastic Optics, and Variational Inverse Problems...

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The Mathematics of EUV Lithography: PDEs, Stochastic Optics, and Variational Inverse Problems...

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